• Controller: Windows® O/S based touch screen interface offering fully automatic control.


• Multi-step recipes, real time graphic display, multi-level password access, data logging, and real time SPC monitoring of all plasma parameters is provided.


• Chamber: 9" X 13" X 20" Aluminum, with high-conductance KF 40 port and isolation valve. Optional throttle valve available.


• Electrode options include 3-shelf, 5-shelf, and cage electrodes.


• RF Generator: 300 or 600 watt 13.56 MHz air cooled with automatic impedance matching network.


• Display: Color 10.4 inch touch screen for control and monitoring of process parameters, automatic recipes, or manual plasma treatments.


• Two user specified gases, with 500 sccm MFCs standard, Optional 3rd gas channel available.


• Power Requirements: 120- 240 volts, 1ø, 50/60 Hz 30 amps maximum, changeable in the field.


• CE Certified

Safety and Security

• Electronic and software interlocks

· RF power
· Pressure
· Chamber door open/close


• Emergency OFF front and rear of reactor center and on wall box.


• Password security for manual and edit modes.


• Audible alarms.


• Software alarm limits on critical process parameters.


• Over-temperature alarm sensor (generator).


• Hard-wired RF relay interlocked with process chamber door.


• External interlock connection to extend 24 VAC control loop.