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| Microwave Plasma System FPD40 |
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Technical Specifications: Plasma Chamber: Aluminum, Volume 70 liters, gas distribution plate and IR-heating Plasma Generation: MW Frequency 2.45 GHz, max.2.000 Watt, variable power Options: Vacuum pump system Related Applications: |
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Flat Panel Display plasma System FPD 40 The Flat Panel Display plasma system FPD 40 is a fully automated production plant with two separate plasma chambers and a central loading robot for use in high-throughput production of flat panel displays. The machine is mainly used to for surface conditioning of coatings, clean glass plates or for removing photoresist masks after etching. The large microwave plasma source provides a high level of uniformity.
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