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| RF Plasma System 600 Series |
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Technical Specifications: Plasma Chamber:
Plasma Generation: Options: Cassette loading station
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Microwave Plasma System PS 600 The PS 600 series comprises of the models PS 600 S, PS 600 SA and PS 600 AL and are similar to the series PS 300 using plasma genertion at radio frequency of 13.56 MHz. All models are equipped with an automatic impedance matching and include an aluminum stand which contains the RF-generator and matching control unit. |
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